The Eastjesus Company
Lost Tech Archive

Micro Thermal Conductivity Sensor/Heater Element
(from 1981)
SEM photo of Thermal Conductivity Sensor/Heater Element
This is a SEM photograph of an actual fabricated prototype 4nl dead volume thin film thermal conductivity detector/heater element. Its dimensions were 3um wide, 3-4 um thick, and about 500um long. It was self-supporting and made with 5% Rh-Platinum etched on a silicon wafer. It had an electrical time constant of 40uS and a volumetric time constant of typically 100uS.

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